In the field of high-end manufacturing, a 0.005mm verticality deviation may lead to a 300MHz frequency
shift of 5G base station filters; a similar error in medical devices can reduce the joint drive efficiency of
surgical robots by 28%. As the core carrier of precision devices, the perpendicularity test of the initiator
chip has formed a stringent industry standard system. This article will reveal the 5 key standards and
their practical application scenarios.
Semiconductor-level precision: SEMI F47-0200 standard
Core requirements: In the temperature fluctuation of ± 0.5 ℃ environment, the resolution of the detection
instrument needs to reach 0.1 μm, repeat measurement error does not exceed 0.3 μm. non-contact
measurement using laser interferometry, to ensure that the detection process does not introduce
secondary deformation.
Typical scenarios:
Substrate inspection after wafer dicing: fully automated scanning of silicon substrates with a thickness
of 0.2mm in a class 100 clean room, generating 2000 data points per wafer
Photolithography carrier table calibration: nanometer-level positioning accuracy correction is achieved
through a 6-axis motion platform with phase measurement
After adopting this standard, a laboratory reduced the photolithography alignment scrap rate from
1.8% to 0.02%.
Aerospace hard standard: AMS 2700D specification
Special provisions: need to simulate -55 ° C to 150 ° C extreme temperature cycling, detection of perpendicularity
changes due to thermal deformation. Compulsory to use laser tracker with temperature compensation function,
sampling frequency not less than 100Hz.
Real-world application:
Aero-engine blade base inspection: synchronized data acquisition of 20 measurement points on a vibration
table to identify resonance-induced micro-deformation
Batch screening of satellite mounts: a machine vision system is used to realize rapid sorting of 15 pieces per minute
A certain model of rocket fuel injector applied the standard, combustion efficiency increased by 12%.
Golden Standard for Automotive Industry: VDA 5.3 System
Innovative points: the introduction of process capability index CPK ≥ 1.67 mandatory requirements, the inspection
system needs to have SPC real-time monitoring function. It is stipulated that the contact probe measuring force
must be ≤0.5N to avoid damage to the workpiece caused by measuring contact.
Production line example:
New energy battery pole piece inspection: Dual-station measuring machine synchronizes the thickness and
perpendicularity inspection, shortening the beat time to 8 seconds/piece.
Transmission gear shaft online monitoring: integrated infrared compensation technology to eliminate the
interference of the oil mist environment on the measurement.
After an automobile enterprise applied the system, the complaint rate of DCT gearbox rattling dropped by 73%.
Medical device lifeline: ISO 13485 extended requirements
Special specifications: Measurement uncertainty must be labeled in the test report, and biocompatibility verification
is required for verticality testing of implantable devices. Mandatory use of inert gas protection under the
measurement environment.
Key applications:
Artificial joint matrix screening: medical-grade titanium probes for zero-contamination testing
Full inspection of minimally invasive surgical blades: High-magnification optical system identifies edge deflection at 0.5μm level
After an orthopedic implant enterprise implemented the standard, the postoperative infection rate was reduced by 41%.
Invisible Law in Optical Industry: MIL-PRF-13830B Upgraded Version
Technological breakthrough: Requirements for simultaneous detection of visible and infrared wavelength reflectance
characteristics, perpendicularity evaluation needs to be combined with optical performance parameters. Polarized
light interferometry is introduced, with an accuracy of λ/200 (about 3nm).
Typical scene:
AR glasses waveguide sheet inspection: optical range difference analysis in the full spectral range of 380-780nm
Lidar prism calibration: simultaneous measurement of mechanical perpendicularity and beam collimation deviation
A laser equipment manufacturer applied the standard and the beam quality factor M² value was optimized to 1.15.
Inspection Technology Evolution: From Mechanical Gauges to Quantum Sensing
Contact CMMs are being replaced by white light interferometers, increasing inspection efficiency by 20 times. After the
introduction of femtosecond laser measurement system in a new energy enterprise, the detection uncertainty is
compressed from 0.8 μm to 0.05 μm. The emergence of the latest quantum gravity gradiometer makes the verticality
detection break through the limit of classical physics, and realizes the measurement of atomic level precision in the
deep earth laboratory.
In a precision manufacturing base, an intelligent inspection line integrating five major standards completes the
full-parameter inspection of 20,000 pieces of starter sheets every day. The latest data from a testing center shows
that the product premium of enterprises adopting the standard system reaches 35%. When the verticality testing
standard becomes the common language of the industry, what we usher in is not only the improvement of
precision, but also the qualitative upgrading of the whole industrial ecology.